| 轴别 | 参数 | Unit / Condition | Target |
| X1, X2-axis (Upper, stack) |
有效行程 | mm | 500 |
| Max. Speed 速度 | mm/sec | 1900 | |
| Max. Acceleration 加速度 | G | 2 | |
| 重复定位精度 | µm | ±0.35 | |
| 定位精度 | µm/(1D calibrated) | ±0.5 | |
| 直线度 | µm | ±5 | |
| Flatness | µm | ±5 | |
| Yaw | arcsec | ±1.5 | |
| Pitch | arcsec | ±5 | |
| Roll | arcsec | ±3 | |
| Settling time | ms | move 100mm/sec, 15mm @window ±100nm, <100ms | |
| Jitter | nm | ±30 |
| 轴别 | 参数 | Unit / Condition | Target |
| Y1,Y3-axis (Bottom, stack) |
有效行程 | mm | 520 |
| Max. Speed 速度 | mm/sec | 1900 | |
| Max. Acceleration 加速度 | G | 2 | |
| 重复定位精度 | µm | ±0.35 | |
| 定位精度 | µm/(1D calibrated) | ±0.5 | |
| 直线度 | µm | ±5 | |
| Flatness | µm | ±5 | |
| Yaw | arcsec | ±5 | |
| Pitch | arcsec | ±1.5 | |
| roll | arcsec | ±3 | |
| Jitter | nm | ±30 |
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